Dielectric breakdown I: A review of oxide breakdown
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چکیده
منابع مشابه
Dielectric breakdown I : A review of oxide breakdown
T he properties o f thin dielectrics remain very important tbr the reliability o f semiconductor devices. In the first place we think of the gate oxide in integrated circuits. It is well known that defects, contamination and metal impurities are hazardous for a sufficient lifetime of the integrated circuits. Therefore, a large effort is spent on the construction of better clean rooms, in the fi...
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ژورنال
عنوان ژورنال: Microelectronics Journal
سال: 1996
ISSN: 0026-2692
DOI: 10.1016/0026-2692(95)00104-2